Scheduling Revisited Workstations in Integrated-Circuit Fabrication

Practical Approaches to Scheduling and Planning

Volume

Practical Approaches to Scheduling and Planning

Contents

This paper describes the Photo Dispatcher system which has been developed to make machine-loading recommendations at a sat of key fab machines. Dispatching policies that generally perform well in job shops (e.g., Shortest Remaining Processing Time) perform poorly for workstations such as photolithography which are visited multiple times by the same lot of silicon wafers.